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Fabrication of Microwave Resonators in TiN

Iffat Rafique Arisa

Abstract


The uses of titanium nitride (TiN) thin films are investigated for use in superconducting circuits. These circuits benefit from having a material that have a high resistivity, high superconducting transition temperature (), low loss at microwave frequencies, and a high kinetic inductance.  is sputter deposited 70 nm thick onto silicon and tested with a four-point probe both at room temperature and as low as 0.5K to find the critical temperature and the resistivity. Superconducting microwave resonators are also fabricated using photolithography and a reactive ion etch as a means of determining the losses of  wires in an actual circuit. The films were shown to be superconducting with a tunable  and the resonators had high internal and coupling quality factors. These tests show the viability of  thin films in superconducting circuits. Future work on reducing the feature size of potential circuits as well as working to make more complex circuits such as hybrids with  that can create Josephson junctions are an important step towards creating some of the lowest loss superconducting circuits.

 


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DOI: https://doi.org/10.37628/ijemd.v6i2.1469

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