Deposition and Characterization of ZnO Thin Films by Thermal Vacuum Thermal Evaporation Method for Photoconductive Sensor Application

Authors

  • Arun Dev Dhar Dwivedi Laboratoire IMS, CNRS - UMR 5218, Université de Bordeaux 1 Cours de la Libération - 33405 Talence Cedex, France Phone: +919450547267, +33 753422024
  • Sumit Vyas Motilal Nehru National Institute of Technology, Allahabad-211004,
  • Shaivalini Singh Department of Electronic Engineering, Yeungnam University, Gyeongsan, South Korea

DOI:

https://doi.org/10.37628/ijmdic.v2i1.219

Abstract

In this work we have deposited ZnO thin films using thermal evaporation method. The films have been deposited on silicon substrate for structural characterization and on glass substrate for optical characterization. The structural, surface morphology, optical properties and electrical properties of ZnO thin films were investigated systematically using X-ray diffractometer (XRD), scanning electron microscope (SEM), atomic force microscopy (AFM), ellipsometeric measurement and semiconductor parameter analyzer respectively. The deposited ZnO thin films exhibit polycrystalline nature with hexagonal wurtize structure. The surface of the films was composed of uniform grains and band gap was estimated around 3.19 eV. The electrical characterization of the Al/ZnO thin films contacts revealed that the ohmic contact fabricated by a simple and inexpensive method can be used for fabrication of photoconductive sensors applications. Keywords: RF sputtering, scanning electron microscopy, thermal oxidation, X-ray diffractometer, ZnO thin films

Author Biographies

Arun Dev Dhar Dwivedi, Laboratoire IMS, CNRS - UMR 5218, Université de Bordeaux 1 Cours de la Libération - 33405 Talence Cedex, France Phone: +919450547267, +33 753422024

Dr Arun Dev Dhar Dwivedi is visiting Scientist with IMS Lab University of Bordeaux, France. He was senior Device modeling engineer wit Silvaco Singapore office during 2011-2015. He earned his Ph. D. in Electronics Engineering from IIT (BHU) varanasi. His research interest included Microelectronics, VLSI design, Nanoelectronics, Optoelectronics and Photonics, Organic electronics, Power semiconductor devices, Electrical and Optical communication.

Sumit Vyas, Motilal Nehru National Institute of Technology, Allahabad-211004,

Motilal Nehru National Institute of Technology, Allahabad-211004,

Shaivalini Singh, Department of Electronic Engineering, Yeungnam University, Gyeongsan, South Korea

Department of Electronic Engineering, Yeungnam University, Gyeongsan, South Korea

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Published

2016-07-16

Issue

Vol. 2 No. 1 (2016)

Section

Articles