Surface-Driven Capillary Flow of Dyed Working Liquid in the SU-8 based Glass Microfluidic Device Fabricated by Maskless Lithography and Indirect Bonding Technique

Abstract

A single SU-8 based glass microfluidic device is fabricated by the maskless lithography and indirect bonding technique, using the negative photoresist SU-8. Polymethylmethacrylate (PMMA) dissolved in EC solvent (SU-8 developer) is used as the prepared adhesive material in the indirect bonding technique. Dyed water (90% red coloured food dye, 10% distilled water) is prepared as the working liquid. A CMOS camera catching 25 frames per second with a corresponding time-scale resolution of 0.04 second is used to record the surface-driven capillary flow of prepared dyed water in leakage-free condition. This work will be useful to fabricate the SU-8 based laboratory-on-a-chip systems for different microfluidic applications in future.

Keywords: Microfluidic device, dyed water, capillary flow, SU-8, indirect bonding