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Deposition and Characterization of ZnO Thin Films by Thermal Vacuum Thermal Evaporation Method for Photoconductive Sensor Application

Arun Dev Dhar Dwivedi, Sumit Vyas, Shaivalini Singh

Abstract


In this work we have deposited ZnO thin films using thermal evaporation method. The films have been deposited on silicon substrate for structural characterization and on glass substrate for optical characterization. The structural, surface morphology, optical properties and electrical properties of ZnO thin films were investigated systematically using X-ray diffractometer (XRD), scanning electron microscope (SEM), atomic force microscopy (AFM), ellipsometeric measurement and semiconductor parameter analyzer respectively. The deposited ZnO thin films exhibit polycrystalline nature with hexagonal wurtize structure. The surface of the films was composed of uniform grains and band gap was estimated around 3.19 eV. The electrical characterization of the Al/ZnO thin films contacts revealed that the ohmic contact fabricated by a simple and inexpensive method can be used for fabrication of photoconductive sensors applications.

Keywords: RF sputtering, scanning electron microscopy, thermal oxidation, X-ray diffractometer, ZnO thin films

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References


Ozgur U, Hofstetter D., Morkoc H. Proc. of IEEE. 2010; 98(1).

Liu K.W., Tang Y.D., Cong C.X. et al. Appl. Phys. Lett. 2009; 94(15).

Cembrero J., Elmanouni A., Hartiti B. et al. Thin Solid Films. 2004; 198: 451–2p.

Kim T.W., Choo D.C., No Y.S. et al. Appl. Surf. Sci. 2006; 245: 1917.

Lin K.M., Tsai P. Mater. Sci. Eng. B. 2007; 139: 1.

Hupkes J., Rech B., Calnan S. et al. Thin Solid Films. 2006; 502: 286p.

Singh S., Nunna R., Periasamy C. et al. Int. J. of Contemporary Research in Engg. and Tech. 2011; 1: 1p.

Singh S., Chakrabarti P. J. of Nanoscience and Nanotechnology. 2011; 11.

Sadek Z., Choopun S., Wlodarski W. et al. IEEE SENSORS J. 2007; 7(6).

Shewale P.S., Kamble B.N., Moholkar A.V. et al., IEEE SENSORS J. 2013; 13:1p.

Arya S. K., Saha S., Ramirez-Vick J. E. et al. Analytica Chemica Acta. 2012; 737.

Singh S. P., Arya S.K., P. Pandey, B. D. Malhotra, S. Saha et al, Appl. Phys.Lett. 91, 063901 (2007).

Batra N., Tomar M., Gupta V. J. Appl. Phys. 2012; 112: 114701.

Ding J.J., Ma S.Y., Chen H.X. et al. Physica B. 2009; 404: 2439.

Singh S., Chakrabarti P. Superlattices and Microstruct. 2013; 64.

Venkatachalam S., Iida Y., Kanno Y. Superlattices and Microstruct. 2008; 44: 127p.

Marotti R.E., Bojorge C.D., Broitman E. et al. Thin Solid Films. 2008; 517: 1077p.

Periasamy C., Chakrabarti P. J. Vac. Sci. Technol. 2009; B 27: 2124p.

Singh S., Ali G. M., Chakrabarti P. Science of Advanced Materials. 2011; 40: 3p.

Singh S., Chakrabarti P. Advanced Science, Engineering and Medicine. 2013; 5: 12p.




DOI: https://doi.org/10.37628/ijmdic.v2i1.219

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