An Overview of RF MEMS Components by Microwave Theory and Techniques

Abstract

This paper offers with a rather new location of radio-frequency (RF) technology primarily
based on microelectromechanical systems (MEMS). RF MEMS gives a class of new devices
and components which show advanced high-frequency performance relative to standard
(commonly semiconductor) gadgets, and which enable new device abilities. Further, MEMS

gadgets are designed and fabricated by means of techniques much like those of very massive-
scale integration, and may be synthetic through traditional batch-processing strategies. In

this paper, the simplest device addressed is the electrostatic micro switch—possibly the
paradigm RF MEMS device. Thru its advanced performance characteristics, the micro switch

is being developed in a number of current circuits and systems, which includes radio front-
ends, capacitor banks, and time-delay networks. The superior overall performance combined

with extremely-low-energy dissipation and big-scale integration must enable new system
functionality as well. Possibilities addressed right here are quasi-optical beam guidance and
electrically reconfigurable antennas.

Keywords: antennas, microwave theory, large-scale integration, RF MEMS, semiconductor